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Axus Technology Delivers Industry’s Lowest Cost of Ownership for CMP Processes on 200mm SiC Wafers

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Comments (1)
  1. While the factors mentioned in the article could result in a lower COO compared to other solutions, how can anyone be sure of the algorithms that drove the stated results? This is the exact reason that SEMATECH, SEMI, and industry experts worked together in the early to mid-1990’s to develop an industry guideline on the exact approach to be used for COO calculations. That guideline is SEMI E35. There is no mention of adherence to this standard or the other related standards on reliability (E10) or subsets of COO such as OEE (E79).

    If I may be allowed some self promotion, why are managers still allowing resources to be spent recreating the wheel? Commercial software solutions exist and have since SEMATECH arranged for them in 1994. Those solutions are likely a fraction of the cost of homegrown spreadsheets and have the added advantage of meeting industry standards; thus, eliminating any skepticism on the part of the fab owner with regards to how the results were calculated.

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