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What’s new in the latest ITRS

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Comments (1)
  1. Neil Hendricks says:

    The ITRS projections for reduced dielectric constant values were completely unrealistic for the past 15 years. The engineers (virtually no chemists nor material scientists) who continually wrote these fantasies were oblivious to the realities of the material property and processing requirements when judged against the actual, real-world material options. Dr. Wilbert M. van den Hoek, former CTO at Novellus, and I were, from among the leading researchers in the field, the two most realistic voices on this subject. Frankly while there were many engineering managers at Sematech and elsewhere that had likely forgotten more about semiconductor manufacturing than I ever knew, only a few of us could see the handwriting on the wall on the low k issue. The material properties / processing characteristics simply could not and would not be realized in any timeframe remotely consistent with one ludicrous revision after another of the ITRS Roadmap for Interconnect. The current summary downplays the repeated failures of the very well paid authors of these fantasies, when honor and honesty demand that these failures be laid where they below – at the feet of the people who wrote this nonsense. It’s likely that over a billion dollars was wasted on futile efforts based on material systems that had no hope of success. Enormous amounts of wasted funding in academia, materials companies, and equipment manufacturers. While I worked on both fluorinated organic polymers and organically modified glass, it became abundantly obvious to honest scientists as early as 1999 that these and similar solutions were fruitless. Take responsibility, Sematech. Of course the management of the materials and equipment companies who authorized these enormous expenditures, with virtually no hope of success, have all moved on to bigger and better things, that being the nature of things. It has always been obvious to educated and knowledgeable chemists and material scientists that only some kind of modified air bridge could possibly solve this problem.

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