ClassOne Equipment (classoneequipment.com), announced the delivery of its advanced new Takano WM-10 particle measurement system to EUV Tech, a global leader in metrology equipment for cutting-edge EUV chip manufacturing. The announcement was made by ClassOne Equipment Vice President, David Pawlak, and EUV Tech Vice President of R&D, Matt Hettermann.
Said Hettermann, “A key factor in our selecting the new 300mm Takano WM-10 system was its very high-sensitivity particle detection. For us, particle sensitivity is critical because we are using the new Takano tool to validate the cleanliness of the equipment we build – which are some of the most advanced EUV and soft-x-ray systems in the industry.”
“We have the new WM-10 running in our fab in Martinez, California,” added Hettermann. “And we’re already seeing the outstanding performance it delivers – routinely detecting particles down to 48nm. Plus, it’s configured to handle not only 300mm wafers but also 200mm and 150mm.”
Pawlak pointed out that Takano-brand particle detection systems are among the top-selling new tools in ClassOne Equipment’s product lineup. Along with best-in-class detection sensitivity, the Takano equipment provides high throughput, repeatability and reliability, plus a suite of options. And very importantly, the systems are attractively priced and readily available. These are also some of the reasons why Takano is becoming the new-technology replacement-of-choice for legacy Surfscan systems, which for many years were an industry “standard” for wafer particle detection.
ClassOne Equipment is the exclusive source for sales, service and complete support of Takano-brand particle detection systems across North America and Europe. ClassOne maintains a team of specially-trained field engineers to provide installations, PMs and all other services on Takano systems.