Energy efficient, harsh duty performance dry pumps

The Pfeiffer Vacuum A4 range of harsh process dry pumps features energy efficient multi-stage Roots technology, advanced corrosion and byproduct resistance, and superior powder handling capability. They are able to address the latest challenges and requirements of 20 nm nodes and beyond. Designed for extended process lifetimes and superior powder handling, the A4 series provides one of the lowest COO on the market. www.pfeiffer-vacuum.com