Ferdinand-Braun-Institut, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) in Berlin has already been using two wafer processing systems for some time now, which are now being upgraded with the newly developed, highly convenient amcoss ams PILOT process control software.
“A software for efficient surveillance and control of the manufacturing process, a so-called Manufacturing Execution System (MES), is currently being introduced at the Ferdinand-Braun-Institut (FBH) to further improve the quality and efficiency of processes and products. The system software from amcoss allows the automated, fast and secure exchange of system and process data with the MES software”, Dr Olaf Krüger explains, Process Technology Manager at FBH. This would not have been possible with the old machine control software that previously controlled the two systems. The upgrade with the modern and self-explanatory ams PILOT software from amcoss was, therefore, a logical and necessary step.
With the ams PILOT software, FBH has gained a tool with a visually appealing, ergonomic and intuitive user interface. It scores with convenient features such as simple recipe development, integrated scheduling and uncomplicated updates to the latest Windows versions. In addition, the user management noticeably eases the daily work on the systems with several users. “Diverse service features and screens as well as the practical remote maintenance option ensure a high level of serviceability”, amcoss company owner David Erne explains, “and the integrated Energy Safe Mode saves energy and media, increases energy efficiency and conserves resources.”
The ams PILOT is completely compliant with the E95-1101 semi-standard and can be extended with an optional SECS/GEM interface.
amcoss equips all amc and amr systems built since 2020 with the ams PILOT software as a standard. Needless to say, all older systems already available on the market by amcoss can also be upgraded with ams PILOT to profit from its advantages and to be brought up to date software-technically. Since the software is platform independent, it can also be adjusted and upgraded to the machinery of other manufacturers at any time.
For the best reproducibility
Wafers, with the amcoss systems at FBH Berlin in the production of high-brilliance diode lasers, UV light-emitting diodes, microwave circuits and components for power electronics, are coated with electron beam and photoresists, and exposed wafers are developed. The use of automated technology ensures the highest quality and reproducibility as well as compatibility for industry partners.
This project was partly funded by the German BMBF within the “Forschungsfabrik Mikroelektronik Deutschland (FMD)” framework under ref. 16FMD02.
The Ferdinand-Braun-Institut GmbH, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) is one of the leading institutions for application- and industry-oriented research in microwave engineering and optoelectronics. It researches and realizes electronic and optical components, modules and systems based on compound semiconductors which are key elements for innovation in the social fields of communications, energy, health, and mobility.
amcoss GmbH develops and manufactures, amongst others, customer-specific fully and semi-automated single wafer equipment for coating, developing, tempering, cleaning, as well as lift-off and etching of subtstrates and masks made of different materials.