Veeco Instruments Inc. today announced that a semiconductor manufacturer has ordered Veeco’s WaferStorm Wet Processing System for next generation wireless applications. The system was chosen due to its process performance and low cost of ownership advantage compared to other platforms. The customer operates multiple WaferStorm systems in various production facilities located around the world. This platform will now be utilized for additional process steps for RF filter production.
“We are proud to continue a strong relationship with this valued customer and to have been qualified for high-volume production in their facility,” commented Adrian Devasahayam, Ph.D., Senior Vice President, Product Line Management. “Our WaferStorm wet processing system enables next generation wireless communications in large part because of our proprietary ImmJET solvent technology, a combination of batch immersion and single wafer spray processing, that delivers superior process capabilities and low cost of ownership for photoresist strip and dry film strip applications.”
Veeco’s wet processing technologies are used to manufacturer RF filters with low chemistry usage, high throughput and exceptional process results.