Trelleborg Sealing Solutions showcases two new additions to its Isolast PureFab FFKM material range at Semicon Europa 2022 at Neue München, Munich, Germany, at booth number C1.842 from November 15 to 18.
Chris Busby, Semiconductor Segment Director at Trelleborg Sealing Solutions, says: “With extreme temperatures and increasingly more aggressive chemical precursors used in semiconductor environments, reliable sealing solutions are essential to prevent premature failure. At Semicon Europa we are launching two significant additions to our Isolast PureFab range, specifically engineered to address the challenges of critical semiconductor sealing environments.”
Isolast PureFab JPF40 is an ultra-high temperature perfluoroelastomer (FFKM) developed for demanding subfab applications and thermal processes, including rapid thermal processing (RTP), atomic layer deposition (ALD), and oxidation. The material offers unrivalled compression set performance at operating temperatures from +200 °C/+392 °F to +300 °C/+552 °F. This ensures sealing integrity for critical processes, withstanding peak application temperatures over +325 °C/+617 °F, the highest temperature capability of an elastomer material.
Isolast® PureFab™ JPF22 is an excellent all-round FFKM seal with superior chemical compatibility suitable for a wide range of semiconductor applications. The material offers excellent resistance to wet process chemicals and steam, as well as amine-based ALD precursors.
Additionally, visitors to Trelleborg’s stand will be able to discover its Isolast® K-Fab™ Seal for critical subfab applications, which is temperature resistant for use up to +327 °C/+620 °F dependent on the material selection. It is suitable for combination with both aluminum or stainless steel and for manufacture from a range of elastomer materials including Isolast® FFKM, Isolast® PureFab™ FFKM, PureFab™ Fluoroelastomer (FKM) for ultra-high purity, and standard FKM.