Semiconductor FABS are the largest industrial user of pure and ultrapure water (UPW), which are vital to quality and yield in the production of wafers and integrated circuits.

Today’s industry is challenged to produce more accurate measurements and higher-quality UPW, as well as reduce the volume of water and energy used in production; along with maintaining a focus on water reclaim, reuse, recycle.

With demand for semiconductors continuing to grow and rapid advancements in the industry, critical analytical parameters required for the production of UPW for improved process control and knowledge on how to use these measurements for maximum output are key.

Key points covered:

  • Total Organic Carbon control to ensure detection of sub-ppb organics and prevent bacterial contamination.
  • Resistivity to monitor the ionic UPW quality and its quality in the RCA process and other SEMI tools.
  • Dissolved oxygen and its monitoring and control in UPW.
  • pH control as a critical parameter to the CMP process and HF, ammonia waste neutralization.
  • Recommendations for segregation of reclaim/reuse/recycle streams.

Presented by:

Jim Cannon
Head of OEM & Markets, Mettler Toledo Thornton

After receiving a B.S. in Biology, he continued with graduate degrees in Microbiology and Biophysics and an MBA in Marketing and International Management. Mr. Cannon has over 35 years of experience managing, designing, and developing ultrapure water treatment and technology. This includes measuring differential conductivity and UV oxidation for the detection of TOC in UPW and the design and commercialization of electrodeionization modules. He has been involved in the development and commercialization of alternative online microbial detection technology.

Mr. Cannon is currently involved in the standards and regulatory organizations for the semiconductor, photovoltaic, and pharmaceutical markets, including the Facilities and Liquid Chemicals Committee, Reclaim/Reuse/Recycle Task Force, and the UPW Task Force.

Moderated by:

Pete Singer

Sponsored by:


METTLER TOLEDO is a leading global manufacturer of high precision instruments. We are the world’s largest manufacturer of weighing instruments for use in industrial, laboratory, and food applications. Our industrial products optimize manufacturing efficiency using scales, terminals, and software that control and monitor production processes.

We provide innovative instruments that integrate various technologies including application-specific solutions for customers. We design our instruments not only to gather valuable data but also to facilitate the processing and transfer of this data into customers’ management information systems.

With global headquarters in Greifensee, Switzerland and US headquarters in Columbus, OH, we employ roughly 18,000 people across the globe.

Additional information about METTLER TOLEDO can be found at mt.com.