Lithoscale Archives - Semiconductor Digest

Protec MEMS Technology Orders Maskless Lithography System from EVG

The LITHOSCALE system will be installed at PMT’s headquarters in Asan-si, Chungcheongnam-Do, South Korea, where it will be used in the production of next-generation MEMS-based probe cards for wafer-level testing of advanced NAND, DRAM and High Bandwidth Memory (HBM) devices.

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