The key to precisely controlling the chemicals used in ALD and ALE during the thousands of “on and off” steps to deposit or etch one layer is the valve design.
Advancing the Future of Semiconductor Manufacturing
Manufacturing innovation can be achieved through greater capacity utilization, component reliability, and process control.
Overcoming ALD Limitations to Maximize Manufacturing Precision and Efficiency
How the next generation of ultrahigh-purity ALD valves opens new opportunities.
