Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it began shipping its new KrF light source model ‘G60K’ on October 29.
A full model change for the first time in about 15 years and the introduction of a new power supply unit has made it possible for the new KrF light source model ‘G60K’ to output 60 W, which is 1.5 times greater than that of the previous model. By this improvement, maximum 150% scanner productivity enhancement is expected. Furthermore, the body uses a new platform that also offers augmentability to support future KrF lightsource performance improvements to support further scanner productivity enhancement in the future.
Until now, conventional KrF lightsources had been presented the dilemma that although throughput increases at high output, the amount of downtime increases due to increased module replacement, and thus, the availability of the light source decreases. The new technology of the ‘G60K’ model enables to achieve both high output and high availability without increasing the amount of downtime. It also enables to achieve maximum throughput in the high dose layer.
Katsumi Uranaka, President & CEO of Gigaphoton said, “Our KrF lightsources are products with compilation of our technology and experience, and have been highly regarded by our customers for a long time. We are confident that the G60K, which has undergone a full model change for the first time in 15 years, will be highly occupied in the field and further increase the productivity of our customers. We will continue to provide products and services that maximize productivity.”