The Echo Opto-Acoustic Metrology System from Onto Innovation, Inc. has won the 2023 Best of West award, SEMI and Semiconductor Digest announced today at SEMICON West 2023, July 11-13 at the Moscone Center in San Francisco. Presented by SEMI and Semiconductor Digest each year, the Best of West award recognizes innovative new products or services that are significantly advancing the electronics manufacturing supply chain or a particular manufacturing capability.
The Echo™ opto-acoustic metrology system delivers non-destructive wafer-level metrology for measurements of single and multi-layer opaque films ranging in thickness from 50Å to 35µm. It uses Picosecond laser ultrasonic (PULSE™) technology, a semiconductor industry workhorse for over 20 years that provides comprehensive metal film thickness metrology.
“The Echo system provides metal thickness and characterization for a variety of devices, including RF filters for 5G communications, and power devices for the rapidly growing electric vehicle (EV) and high-speed portable charger markets,” said Pete Singer, Editor-in-Chief of Semiconductor Digest. “Congratulations to Onto Innovation for winning the Best of West competition two years in a row.”
The company’s Atlas V Optical Critical Dimension Metrology Tool won the award in 2022.
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include:
- Un-patterned wafer analysis
- 3D metrology spanning chip features from nanometer scale transistors to large die interconnects
- Macro defect inspection of wafers and packages
- Metal interconnect composition
- Factory analytics
- Lithography for advanced semiconductor packaging
Onto Innovation will receive the Best of West award today at SEMICON West 2023.