Pete's Posts

Should lifetime of EUV optics be a concern?

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Comments (1)
  1. Dave White says:

    Stepper / Scanner Optics have always degraded with number of exposures. This has been true from G-line to EUV and onward. After alpha and beta tools, the optics will be checked and improved for longer life. Challenges for sure. But it is Litho, the most challenging semi work.